ダイヤモンド表面の個々の原子の可視化に成功

2025年01月08日 22:00:00
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東京大学と産総研の研究グループは、ダイヤモンドの表面を原子レベルで観察する技術を開発しました。ダイヤモンドはパワー半導体や量子デバイスの材料として期待されていますが、製作過程での微細なデバイスには原子レベルの欠陥が性能に影響を及ぼすことがあります。今回、原子間力顕微鏡を用いてダイヤモンド表面の炭素原子を初めて可視化に成功しました。この技術により、ダイヤモンド薄膜の成長機構の解明やデバイス性能の向上が期待されています。

ダイヤモンドデバイスを原子レベルで分析する道が開ける

発表のポイント
◆ 究極のパワー半導体として期待されるダイヤモンド表面の個々の原子の可視化に成功し、可視化されるしくみを明らかにしました。
◆ ダイヤモンドの薄膜成長やデバイス性能に関わる原子レベルの欠陥が観察されました。
◆ ダイヤモンド薄膜の成長機構の解明や、ダイヤモンドデバイスの性能向上に大きく貢献することが期待できます。

【画像：https://kyodonewsprwire.jp/img/202412272329-O1-7D3Ptlk4】

概要
東京大学大学院新領域創成科学研究科の杉本宜昭教授らの研究グループは、東京大学物性研究所の尾崎泰助教授らの研究グループと産業技術総合研究所（以下、産総研）先進パワーエレクトロニクス研究センターの小倉政彦主任研究員らの研究グループと共同で、ダイヤモンド表面を原子レベルで観察する技術を開発しました。

ダイヤモンドは究極の半導体として、パワーデバイスや量子デバイスの材料として注目されています。デバイスの製作過程において、微細加工技術で作製される微小なデバイスであるほど、原子レベルの欠陥がデバイス性能へ及ぼす影響が無視できなくなります。デバイスの性能を向上させるためには、ダイヤモンド表面を原子スケールで評価することが必要です。

本研究グループは、原子間力顕微鏡を用いることでダイヤモンド表面の個々の炭素原子の可視化に世界で初めて成功しました。本手法によって原子スケールのダイヤモンドの分析への道が開けたため、今後ダイヤモンド薄膜の成長機構の解明や、ダイヤモンドデバイスの性能向上に大きく貢献することが期待できます。

プレスリリースの詳細はこちら
https://www.aist.go.jp/aist_j/press_release/pr2025/pr20250108_2/pr20250108_2.html

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